Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10014185 | Selective etch of metal nitride films | Liqi Wu, Wenyu Zhang, Wei V. Tang, Leung Kway Lee, Xinming Zhang +1 more | 2018-07-03 |
| 9914999 | Oxidized showerhead and process kit parts and methods of using same | Muhammad M. Rasheed, Balasubramanian Ramachandran, Kevin A. PAPKE, Lei Zhou, Jing Zhou | 2018-03-13 |