Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10014185 | Selective etch of metal nitride films | Liqi Wu, Wenyu Zhang, Shih Chung Chen, Wei V. Tang, Leung Kway Lee +1 more | 2018-07-03 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10014185 | Selective etch of metal nitride films | Liqi Wu, Wenyu Zhang, Shih Chung Chen, Wei V. Tang, Leung Kway Lee +1 more | 2018-07-03 |