Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9914999 | Oxidized showerhead and process kit parts and methods of using same | Muhammad M. Rasheed, Balasubramanian Ramachandran, Shih Chung Chen, Kevin A. PAPKE, Lei Zhou | 2018-03-13 |