Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10077508 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Swaminathan Srinivasan +1 more | 2018-09-18 |
| 10062598 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Paul Brillhart, Edric Tong, Anzhong Chang +10 more | 2018-08-28 |
| 9914999 | Oxidized showerhead and process kit parts and methods of using same | Muhammad M. Rasheed, Shih Chung Chen, Kevin A. PAPKE, Lei Zhou, Jing Zhou | 2018-03-13 |
| 9870919 | Process chamber having separate process gas and purge gas regions | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Swaminathan Srinivasan +1 more | 2018-01-16 |