Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10119192 | EPI base ring | Steve Aboagye, Paul Brillhart, Surajit Kumar, Anzhong Chang, Mehmet Tugrul Samir +1 more | 2018-11-06 |
| 10077508 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2018-09-18 |
| 9870919 | Process chamber having separate process gas and purge gas regions | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Balasubramanian Ramachandran, Swaminathan Srinivasan +1 more | 2018-01-16 |