Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10132003 | Heating modulators to improve epi uniformity tuning | Shu-Kwan LAU, Joseph M. Ranish, Zhiyuan Ye, Kartik Shah, Mehmet Tugrul Samir +1 more | 2018-11-20 |
| 10119192 | EPI base ring | Steve Aboagye, Paul Brillhart, Anzhong Chang, Satheesh Kuppurao, Mehmet Tugrul Samir +1 more | 2018-11-06 |