Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10132003 | Heating modulators to improve epi uniformity tuning | Shu-Kwan LAU, Surajit Kumar, Joseph M. Ranish, Zhiyuan Ye, Mehmet Tugrul Samir +1 more | 2018-11-20 |
| 10062598 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2018-08-28 |
| 10047457 | EPI pre-heat ring | Shu-Kwan LAU | 2018-08-14 |
| 10000847 | Graphite susceptor | Preetham Rao, Subramani Iyer, Mehran Behdjat | 2018-06-19 |