Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10132003 | Heating modulators to improve epi uniformity tuning | Surajit Kumar, Joseph M. Ranish, Zhiyuan Ye, Kartik Shah, Mehmet Tugrul Samir +1 more | 2018-11-20 |
| 10047457 | EPI pre-heat ring | Kartik Shah | 2018-08-14 |
| 9905454 | Substrate transfer mechanisms | Masato Ishii, Mehmet Tugrul Samir, Jeffrey Tobin | 2018-02-27 |