Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163604 | Multiple charged particle beam apparatus | — | 2018-12-25 |
| 10074515 | Charged particle beam lithography method and charged particle beam lithography apparatus | — | 2018-09-11 |
| 10043634 | Inspection apparatus and inspection method | — | 2018-08-07 |
| 10020159 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | Hiroshi Matsumoto, Tomohiro Iijima, Hideo Inoue, Ryoichi Yoshikawa | 2018-07-10 |
| 9916962 | Multi charged particle beam irradiation apparatus, multi charged particle beam irradiation method, and multi charged particle beam adjustment method | Shinsuke Nishimura, Takanao Touya, Hirofumi Morita | 2018-03-13 |
| 9859096 | Inspection apparatus and inspection method | — | 2018-01-02 |