Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991086 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | — | 2018-06-05 |
| 9916962 | Multi charged particle beam irradiation apparatus, multi charged particle beam irradiation method, and multi charged particle beam adjustment method | Shinsuke Nishimura, Munehiro Ogasawara, Takanao Touya | 2018-03-13 |