Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153139 | Multiple electrode substrate support assembly and phase control system | Kartik Ramaswamy, Steven Lane, Lawrence Wong, Shahid Rauf, Andrew Nguyen +2 more | 2018-12-11 |
| 10141166 | Method of real time in-situ chamber condition monitoring using sensors and RF communication | Lawrence Wong, Kartik Ramaswamy, Steven Lane, Richard Fovell | 2018-11-27 |
| 10115566 | Method and apparatus for controlling a magnetic field in a plasma chamber | Steven Lane, Tza-Jing Gung, Kartik Ramaswamy, Travis Koh, Joseph AuBuchon | 2018-10-30 |
| 10017857 | Method and apparatus for controlling plasma near the edge of a substrate | Andrew Nguyen, Kartik Ramaswamy, Steven Lane, Lawrence Wong | 2018-07-10 |
| 9912926 | Biochemistry measurement device and method thereof | Hong-Ru Guo, Yu-Jin Kao | 2018-03-06 |