Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10090181 | Method and apparatus for substrate transfer and radical confinement | Jared Ahmad Lee, Paul B. Reuter, Imad Yousif, Aniruddha Pal | 2018-10-02 |
| 9947559 | Thermal management of edge ring in semiconductor processing | Aniruddha Pal, Dmitry Lubomirsky, Imad Yousif, Andrew Nguyen | 2018-04-17 |
| 9885567 | Substrate placement detection in semiconductor equipment using thermal response characteristics | Jared Ahmad Lee, Yi Zhou, Changhun Lee | 2018-02-06 |