Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9885567 | Substrate placement detection in semiconductor equipment using thermal response characteristics | Jared Ahmad Lee, Martin Jeffrey Salinas, Changhun Lee | 2018-02-06 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9885567 | Substrate placement detection in semiconductor equipment using thermal response characteristics | Jared Ahmad Lee, Martin Jeffrey Salinas, Changhun Lee | 2018-02-06 |