Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163606 | Plasma reactor with highly symmetrical four-fold gas injection | Yan Rozenzon, Kyle Tantiwong, Vladimir Knyazik, Bojenna Keating, Samer Banna | 2018-12-25 |
| 10090181 | Method and apparatus for substrate transfer and radical confinement | Jared Ahmad Lee, Martin Jeffrey Salinas, Paul B. Reuter, Aniruddha Pal | 2018-10-02 |
| 10008368 | Multi-zone gas injection assembly with azimuthal and radial distribution control | Yan Rozenzon, Kyle Tantiwong, Vladimir Knyazik, Bojenna Keating, Samer Banna | 2018-06-26 |
| 9947559 | Thermal management of edge ring in semiconductor processing | Aniruddha Pal, Martin Jeffrey Salinas, Dmitry Lubomirsky, Andrew Nguyen | 2018-04-17 |