Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163606 | Plasma reactor with highly symmetrical four-fold gas injection | Yan Rozenzon, Kyle Tantiwong, Imad Yousif, Vladimir Knyazik, Bojenna Keating | 2018-12-25 |
| 10008368 | Multi-zone gas injection assembly with azimuthal and radial distribution control | Yan Rozenzon, Kyle Tantiwong, Imad Yousif, Vladimir Knyazik, Bojenna Keating | 2018-06-26 |
| 9978620 | Method and apparatus for reducing radiation induced change in semiconductor structures | Gary E. Dickerson, Seng (victor) Keong Lim, Gregory L. Kirk, Mehdi Vaez-Iravani | 2018-05-22 |
| 9945033 | High efficiency inductively coupled plasma source with customized RF shield for plasma profile control | Vladimir Knyazik, Waheb Bishara, Valentin N. Todorow | 2018-04-17 |