Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9989477 | Simultaneous multi-spot inspection and imaging | Lawrence R. Miller | 2018-06-05 |
| 9978620 | Method and apparatus for reducing radiation induced change in semiconductor structures | Gary E. Dickerson, Seng (victor) Keong Lim, Samer Banna, Gregory L. Kirk | 2018-05-22 |
| 9915622 | Wafer inspection | Anatoly Romanovsky, Ivan Maleev, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll +2 more | 2018-03-13 |
| 9870935 | Monitoring system for deposition and method of operation thereof | Edward W. Budiarto, Majeed A. Foad, Ralf Hofmann, Thomas Nowak, Todd Egan | 2018-01-16 |