Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9915622 | Wafer inspection | Anatoly Romanovsky, Ivan Maleev, Yury Yuditsky, Dirk Woll, Stephen Biellak +2 more | 2018-03-13 |
| 9891177 | TDI sensor in a darkfield system | Jijen Vazhaeparambil, Guoheng Zhao, Anatoly Romanovsky, Ivan Maleev, Christian Wolters +5 more | 2018-02-13 |