Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9995850 | System, method and apparatus for polarization control | Donald Pettibone | 2018-06-12 |
| 9915622 | Wafer inspection | Anatoly Romanovsky, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll, Stephen Biellak +2 more | 2018-03-13 |
| 9891177 | TDI sensor in a darkfield system | Jijen Vazhaeparambil, Guoheng Zhao, Daniel Kavaldjiev, Anatoly Romanovsky, Christian Wolters +5 more | 2018-02-13 |