Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9995850 | System, method and apparatus for polarization control | Ivan Maleev | 2018-06-12 |
| 9970873 | System and method for luminescent tag based wafer inspection | Chuanyong Huang, Kurt L. Haller | 2018-05-15 |
| 9891177 | TDI sensor in a darkfield system | Jijen Vazhaeparambil, Guoheng Zhao, Daniel Kavaldjiev, Anatoly Romanovsky, Ivan Maleev +5 more | 2018-02-13 |