Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10088345 | Haze and defect distribution and aperture configuration in surface metrology inspectors | Raymond Chu, Gordana Neskovic, Dieter Wilk, Christian Wolters, Tim Mahatdejkul | 2018-10-02 |
| 9970873 | System and method for luminescent tag based wafer inspection | Donald Pettibone, Kurt L. Haller | 2018-05-15 |