Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10088345 | Haze and defect distribution and aperture configuration in surface metrology inspectors | Chuanyong Huang, Raymond Chu, Gordana Neskovic, Dieter Wilk, Tim Mahatdejkul | 2018-10-02 |
| 9891177 | TDI sensor in a darkfield system | Jijen Vazhaeparambil, Guoheng Zhao, Daniel Kavaldjiev, Anatoly Romanovsky, Ivan Maleev +5 more | 2018-02-13 |