Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10083816 | Shielded lid heater assembly | Michael D. Willwerth, David Palagashvili, Stephen Yuen | 2018-09-25 |
| 9945033 | High efficiency inductively coupled plasma source with customized RF shield for plasma profile control | Samer Banna, Vladimir Knyazik, Waheb Bishara | 2018-04-17 |