Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163606 | Plasma reactor with highly symmetrical four-fold gas injection | Yan Rozenzon, Kyle Tantiwong, Imad Yousif, Bojenna Keating, Samer Banna | 2018-12-25 |
| 10008368 | Multi-zone gas injection assembly with azimuthal and radial distribution control | Yan Rozenzon, Kyle Tantiwong, Imad Yousif, Bojenna Keating, Samer Banna | 2018-06-26 |
| 9945033 | High efficiency inductively coupled plasma source with customized RF shield for plasma profile control | Samer Banna, Waheb Bishara, Valentin N. Todorow | 2018-04-17 |
| 9911579 | Showerhead having a detachable high resistivity gas distribution plate | Jason C. Della Rosa, Hamid Noorbakhsh, Jisoo Kim, Wonseok Lee, Usama Dadu | 2018-03-06 |