Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9911579 | Showerhead having a detachable high resistivity gas distribution plate | Jason C. Della Rosa, Hamid Noorbakhsh, Vladimir Knyazik, Jisoo Kim, Wonseok Lee | 2018-03-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9911579 | Showerhead having a detachable high resistivity gas distribution plate | Jason C. Della Rosa, Hamid Noorbakhsh, Vladimir Knyazik, Jisoo Kim, Wonseok Lee | 2018-03-06 |