Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991148 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Konstantin Makhratchev, Jason C. Della Rosa, Brad L. Mays, Douglas A. Buchberger, Jr. | 2018-06-05 |
| 9909213 | Recursive pumping for symmetrical gas exhaust to control critical dimension uniformity in plasma reactors | Sergio Fukuda Shoji, Jong Mun Kim, Jason Della Rosa, Ajit Balakrishna | 2018-03-06 |
| 9911579 | Showerhead having a detachable high resistivity gas distribution plate | Jason C. Della Rosa, Vladimir Knyazik, Jisoo Kim, Wonseok Lee, Usama Dadu | 2018-03-06 |