Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10083816 | Shielded lid heater assembly | David Palagashvili, Valentin N. Todorow, Stephen Yuen | 2018-09-25 | $34,271,000 |
| 9948214 | High temperature electrostatic chuck with real-time heat zone regulating capability | Dmitry Lubomirsky, Jennifer Y. Sun, Sehn Thach, Xing Lin, Konstantin Makhratchev | 2018-04-17 | $32,881,000 |
| 9883549 | Substrate support assembly having rapid temperature control | Alexander Matyushkin, Dan Katz, John Holland, Theodoros Panagopoulos | 2018-01-30 | $26,789,000 |