Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153282 | Ultra-high vacuum transport and storage | Richard H. Gould, Edmundo Reyes, John D. Boniface, Ivan L. Berry, III, Alexander Dulkin +1 more | 2018-12-11 |
| 9883549 | Substrate support assembly having rapid temperature control | Alexander Matyushkin, Dan Katz, John Holland, Michael D. Willwerth | 2018-01-30 |