Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10083853 | Electrostatic chuck design for cooling-gas light-up prevention | Alexei Marakhtanov, John Holland, Keith Gaff, Felix Kozakevich | 2018-09-25 |
| 10002782 | ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough | Christopher Kimball, Keith Gaff, Zhigang Chen, Keith Comendant | 2018-06-19 |
| 9883549 | Substrate support assembly having rapid temperature control | Dan Katz, John Holland, Theodoros Panagopoulos, Michael D. Willwerth | 2018-01-30 |