Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10056225 | Adjusting substrate temperature to improve CD uniformity | Keith Gaff, Harmeet Singh, Vahid Vahedi | 2018-08-21 |
| 10049948 | Power switching system for ESC with array of thermal control elements | Keith Gaff, Tom Anderson, Ralph Jan-Pin Lu, Paul Gordon Robertson, Eric A. Pape +1 more | 2018-08-14 |
| 10002782 | ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough | Christopher Kimball, Keith Gaff, Alexander Matyushkin, Zhigang Chen | 2018-06-19 |