Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141163 | Controlling ion energy within a plasma chamber | Thorsten Lill, Alex Paterson, Gowri Kamarthy | 2018-11-27 |
| 10056225 | Adjusting substrate temperature to improve CD uniformity | Keith Gaff, Keith Comendant, Vahid Vahedi | 2018-08-21 |
| 10014192 | Apparatus for atomic layering etching | — | 2018-07-03 |
| 9997333 | Sub-pulsing during a state | John C. Valcore, Jr., Bradford J. Lyndaker | 2018-06-12 |
| 9947557 | Semiconductor processing system having multiple decoupled plasma sources | John Holland, Peter L. G. Ventzek, Richard A. Gottscho | 2018-04-17 |