Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141163 | Controlling ion energy within a plasma chamber | Harmeet Singh, Alex Paterson, Gowri Kamarthy | 2018-11-27 |
| 10096487 | Atomic layer etching of tungsten and other metals | Wenbing Yang, Samantha Tan, Keren Jacobs Kanarik, Jeffrey Marks, Taeseung Kim +1 more | 2018-10-09 |
| 9984858 | ALE smoothness: in and outside semiconductor industry | Keren Jacobs Kanarik, Samantha Tan, Meihua Shen, Yang Pan, Jeffrey Marks +1 more | 2018-05-29 |
| 9953843 | Chamber for patterning non-volatile metals | Meihua Shen, Shuogang Huang, Theo Panagopoulos | 2018-04-24 |
| 9916993 | Ion injector and lens system for ion beam milling | Ivan L. Berry, III | 2018-03-13 |
| 9870899 | Cobalt etch back | Jialing Yang, Baosuo Zhou, Meihua Shen, John Hoang | 2018-01-16 |