Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096487 | Atomic layer etching of tungsten and other metals | Wenbing Yang, Samantha Tan, Keren Jacobs Kanarik, Jeffrey Marks, Taeseung Kim +1 more | 2018-10-09 |
| 9984858 | ALE smoothness: in and outside semiconductor industry | Keren Jacobs Kanarik, Samantha Tan, Thorsten Lill, Yang Pan, Jeffrey Marks +1 more | 2018-05-29 |
| 9953843 | Chamber for patterning non-volatile metals | Shuogang Huang, Thorsten Lill, Theo Panagopoulos | 2018-04-24 |
| 9899234 | Liner and barrier applications for subtractive metal integration | Hui-Jung Wu, Thomas Knisley, Nagraj Shankar, John Hoang, Prithu Sharma | 2018-02-20 |
| 9870899 | Cobalt etch back | Jialing Yang, Baosuo Zhou, Thorsten Lill, John Hoang | 2018-01-16 |