Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096483 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Mirzafer Abatchev, Ardavan Niroomand, Paul A. Morgan, Shuang Meng, Joseph Neil Greeley +1 more | 2018-10-09 |
| 9870899 | Cobalt etch back | Jialing Yang, Meihua Shen, Thorsten Lill, John Hoang | 2018-01-16 |