Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049862 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik +2 more | 2018-08-14 |
| 9953843 | Chamber for patterning non-volatile metals | Meihua Shen, Shuogang Huang, Thorsten Lill | 2018-04-24 |