Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10118263 | Monolithic manifold mask and substrate concepts | Andrew C. Lee, Christopher Pena | 2018-11-06 |
| 10115568 | Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring | Alexei Marakhtanov, John Holland, Zhigang Chen, Felix Kozakevich, Kenneth Lucchesi | 2018-10-30 |
| 10049862 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, James E. Tappan, Jerrel K. Antolik, Ian Kenworthy +2 more | 2018-08-14 |
| 10037869 | Plasma processing devices having multi-port valve assemblies | Daniel Arthur Brown, Leonard J. Sharpless, Allan K. Ronne, James E. Tappan | 2018-07-31 |
| 10014196 | Wafer transport assembly with integrated buffers | John Daugherty, David Trussell, Christopher Pena, Richard H. Gould, Klay Kunkel | 2018-07-03 |
| 9929028 | Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs | David Trussell, John Daugherty, Christopher Pena, Richard H. Gould, Klay Kunkel | 2018-03-27 |