Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10014196 | Wafer transport assembly with integrated buffers | David Trussell, Michael C. Kellogg, Christopher Pena, Richard H. Gould, Klay Kunkel | 2018-07-03 |
| 9972478 | Method and process of implementing machine learning in complex multivariate wafer processing equipment | Joydeep Guha, Vahid Vahedi, Richard A. Gottscho | 2018-05-15 |
| 9947558 | Method for conditioning silicon part | Lin Xu, Hong Shih, Robin KOSHY, Satish SRINIVASAN | 2018-04-17 |
| 9929028 | Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs | David Trussell, Michael C. Kellogg, Christopher Pena, Richard H. Gould, Klay Kunkel | 2018-03-27 |
| 9873940 | Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus | Lin Xu, Hong Shih, Nash W. ANDERSON, Tom Stevenson, John Michael Kerns +1 more | 2018-01-23 |