Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10014196 | Wafer transport assembly with integrated buffers | John Daugherty, Michael C. Kellogg, Christopher Pena, Richard H. Gould, Klay Kunkel | 2018-07-03 |
| 9929028 | Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs | John Daugherty, Michael C. Kellogg, Christopher Pena, Richard H. Gould, Klay Kunkel | 2018-03-27 |