Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134605 | Dual chamber plasma etcher with ion accelerator | — | 2018-11-20 |
| 9972478 | Method and process of implementing machine learning in complex multivariate wafer processing equipment | John Daugherty, Vahid Vahedi, Richard A. Gottscho | 2018-05-15 |
| 9899227 | System, method and apparatus for ion milling in a plasma etch chamber | Butsurin Jinnai, Jun Hee HAN, Aaron Eppler | 2018-02-20 |
| 9870932 | Pressure purge etch method for etching complex 3-D structures | Pilyeon Park | 2018-01-16 |