Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9899227 | System, method and apparatus for ion milling in a plasma etch chamber | Joydeep Guha, Butsurin Jinnai, Jun Hee HAN | 2018-02-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9899227 | System, method and apparatus for ion milling in a plasma etch chamber | Joydeep Guha, Butsurin Jinnai, Jun Hee HAN | 2018-02-20 |