Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10056225 | Adjusting substrate temperature to improve CD uniformity | Keith Gaff, Harmeet Singh, Keith Comendant | 2018-08-21 |
| 9972478 | Method and process of implementing machine learning in complex multivariate wafer processing equipment | Joydeep Guha, John Daugherty, Richard A. Gottscho | 2018-05-15 |