Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10041868 | Estimation of lifetime remaining for a consumable-part in a semiconductor manufacturing chamber | — | 2018-08-07 |
| 9996647 | Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization | Mehmet Derya Tetiker, Saravanapriyan Sriraman, Andrew D. Bailey, III, Alex Paterson | 2018-06-12 |
| 9972478 | Method and process of implementing machine learning in complex multivariate wafer processing equipment | Joydeep Guha, John Daugherty, Vahid Vahedi | 2018-05-15 |
| 9967965 | Distributed, concentric multi-zone plasma source systems, methods and apparatus | Ali Shajii, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William Robert Entley | 2018-05-08 |
| 9966231 | Direct current pulsing plasma systems | Roderick Boswell | 2018-05-08 |
| 9947557 | Semiconductor processing system having multiple decoupled plasma sources | John Holland, Peter L. G. Ventzek, Harmeet Singh | 2018-04-17 |
| 9911578 | Small plasma chamber systems and methods | Rajinder Dhindsa, Mukund Srinivasan | 2018-03-06 |