Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163610 | Extreme edge sheath and wafer profile tuning through edge-localized ion trajectory control and plasma operation | Tom A. Kamp, Alexander Paterson | 2018-12-25 |
| 9996647 | Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization | Mehmet Derya Tetiker, Andrew D. Bailey, III, Alex Paterson, Richard A. Gottscho | 2018-06-12 |
| 9978565 | Systems for cooling RF heated chamber components | Jon McChesney, Ricky Marsh, Alex Paterson, John Holland | 2018-05-22 |
| 9966270 | Gas reaction trajectory control through tunable plasma dissociation for wafer by-product distribution and etch feature profile uniformity | Monica Titus, Alex Paterson | 2018-05-08 |
| 9885493 | Air cooled faraday shield and methods for using the same | John Drewery, Jon McChesney, Alex Paterson | 2018-02-06 |