Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10032681 | Etch metric sensitivity for endpoint detection | Mehmet Derya Tetiker, Duncan W. Mills | 2018-07-24 |
| 9996647 | Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization | Mehmet Derya Tetiker, Saravanapriyan Sriraman, Alex Paterson, Richard A. Gottscho | 2018-06-12 |
| 9941178 | Methods for detecting endpoint for through-silicon via reveal applications | Alan J. Miller, Evelio Sevillano, Jorge Luque, Qing Xu | 2018-04-10 |
| 9864361 | Flexible temperature compensation systems and methods for substrate processing systems | Marcus Carbery | 2018-01-09 |