Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10032681 | Etch metric sensitivity for endpoint detection | Andrew D. Bailey, III, Duncan W. Mills | 2018-07-24 |
| 9996647 | Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization | Saravanapriyan Sriraman, Andrew D. Bailey, III, Alex Paterson, Richard A. Gottscho | 2018-06-12 |