Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134569 | Method and apparatus for real-time monitoring of plasma chamber wall condition | Luc Albarede, Yassine Kabouzi | 2018-11-20 |
| 9941178 | Methods for detecting endpoint for through-silicon via reveal applications | Alan J. Miller, Evelio Sevillano, Andrew D. Bailey, III, Qing Xu | 2018-04-10 |