Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157730 | Control of impedance of RF delivery path | Alexei Marakhtanov, Rajinder Dhindsa, Ken Lucchesi | 2018-12-18 |
| 10134569 | Method and apparatus for real-time monitoring of plasma chamber wall condition | Yassine Kabouzi, Jorge Luque | 2018-11-20 |