Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157730 | Control of impedance of RF delivery path | Rajinder Dhindsa, Ken Lucchesi, Luc Albarede | 2018-12-18 |
| 10115564 | Uniformity control circuit for use within an impedance matching circuit | Felix Kozakevich, Kenneth Lucchesi, John Holland | 2018-10-30 |
| 10115568 | Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring | Michael C. Kellogg, John Holland, Zhigang Chen, Felix Kozakevich, Kenneth Lucchesi | 2018-10-30 |
| 10083853 | Electrostatic chuck design for cooling-gas light-up prevention | Alexander Matyushkin, John Holland, Keith Gaff, Felix Kozakevich | 2018-09-25 |
| 10026592 | Systems and methods for tailoring ion energy distribution function by odd harmonic mixing | Zhigang Chen, John Holland | 2018-07-17 |
| 10002746 | Multi regime plasma wafer processing to increase directionality of ions | Lin Zhao, Felix Kozakevich, Kenneth Lucchesi, Zhigang Chen, John Holland | 2018-06-19 |
| 9984859 | Impedance matching circuit for operation with a kilohertz RF generator and a megahertz RF generator to control plasma processes | Felix Kozakevich, John Holland, Brett Jacobs | 2018-05-29 |