Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115568 | Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring | Michael C. Kellogg, Alexei Marakhtanov, John Holland, Felix Kozakevich, Kenneth Lucchesi | 2018-10-30 |
| 10049862 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik +2 more | 2018-08-14 |
| 10026592 | Systems and methods for tailoring ion energy distribution function by odd harmonic mixing | Alexei Marakhtanov, John Holland | 2018-07-17 |
| 10002746 | Multi regime plasma wafer processing to increase directionality of ions | Alexei Marakhtanov, Lin Zhao, Felix Kozakevich, Kenneth Lucchesi, John Holland | 2018-06-19 |
| 10002782 | ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough | Christopher Kimball, Keith Gaff, Alexander Matyushkin, Keith Comendant | 2018-06-19 |
| 9862141 | Selective laser-assisted transfer of discrete components | Val Marinov, Orven Swenson, Mark J. Pavicic, Ross A. Miller, Ferdous Sarwar +1 more | 2018-01-09 |