Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10074521 | Replaceable upper chamber parts of plasma processing apparatus | Jeffrey Bogart, Ian Kenworthy | 2018-09-11 |
| 10049862 | Chamber with vertical support stem for symmetric conductance and RF delivery | John Holland, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik, Ian Kenworthy +2 more | 2018-08-14 |
| 10037869 | Plasma processing devices having multi-port valve assemblies | Michael C. Kellogg, Leonard J. Sharpless, Allan K. Ronne, James E. Tappan | 2018-07-31 |
| 9922804 | Compression member for use in showerhead electrode assembly | Darrell Ehrlich, Ian Kenworthy | 2018-03-20 |