Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10074521 | Replaceable upper chamber parts of plasma processing apparatus | Daniel Arthur Brown, Jeffrey Bogart | 2018-09-11 |
| 10049862 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik +2 more | 2018-08-14 |
| 9934979 | Gas distribution showerhead for inductively coupled plasma etch reactor | Michael Kang, Alex Paterson | 2018-04-03 |
| 9922804 | Compression member for use in showerhead electrode assembly | Darrell Ehrlich, Daniel Arthur Brown | 2018-03-20 |